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| Magma Announces Excalibur-Litho Fab Analysis Framework Magma Design Automation has announced Excalibur-Litho, a complete fab analysis framework that supports the development and monitoring of advanced lithography solutions. Excalibur-Litho is the first system to efficiently integrate design and real-time data from the semiconductor manufacturing floor, including defectivity, metrology and tool history, enabling an unmatched level of data analysis, monitoring and process control. Excalibur-Litho optimizes yield ramps with built-in solutions for litho qualification through the proprietary coupling of design-based binning, electrical cross mapping, and fab-wide data correlation. This enables unprecedented defect isolation and root cause analysis. Magma and Applied Materials announced on Feb. 28 a collaborative effort to integrate Magma's CAD-based navigation and yield analysis software, which includes Excalibur-Litho, with Applied Materials' advanced inspection tools, such as the Applied UVision 4 system. "This unique combination of design and manufacturing tools has accelerated lithography qualification and enabled quicker yield ramp at multiple customers for the development and production of advanced technology nodes", said ErezParan, manager, Integrated Solutions for Applied Materials' Process Diagnostics and Control business unit. Excalibur-Litho collects and organizes data from the manufacturing process, including defectivity, metrology, electrical tools and manufacturing execution system (MES) data. Wafer information is stacked and easily cross-mapped to any one of the layout, schematic or netlist design representations for easy analysis. Excalibur-Litho is built on an open-architecture database developed by Magma that enables safe and secured CAD access and easy fab integration. This open architecture also ensures interoperability with most inspection tools and yield analysis databases. write your comments about the article :: © 2011 Computing News :: home page |