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Coherent Announces 'Optical Engine' for Laser Crystallization

Coherent Inc. has announced that it started shipment of the LAMBDA SX 315C excimer laser. The new LAMBDA SX 315C laser is optimized for low-temperature polysilicon (LTPS) crystallization used in FPD manufacturing. The system's high throughput is a result of the laser's unique combination of high pulse energy (up to 1050 mJ) and pulse energy stability (0.5%). The laser's proprietary PowerLok and TimeLok technologies ensure this stable laser performance under all conditions.

The market of LTPS based high-performance displays, such liquid crystal displays (LCD), active-matrix organic light-emitting displays (AM OLED) or system on-glass (SOP) displays is rapidly growing. Display manufacturers rely on proven laser-based re-crystallization technologies, such as Excimer Laser Annealing (ELA) and Sequential Lateral Solidification (SLS). The new LAMBDA SX 315C laser is now the optimum laser for both methods, delivering key benefits to FPD manufacturers, including:

- Achieving high and uniform mobility levels to minimize threshold voltage (Vth) variations of thin-film transistors (TFTs), enabling AM OLED mass production.
- Improved production yield through superior laser performance and control.
- Longer component lifetimes resulting in a 20% reduction in cost of ownership.
- Predictive maintenance with real-time internet protocol (IP) e-diagnostics.

The LAMBDA SX 315C is the first in a new generation of high-energy industrial excimer lasers. Designed primarily for the FPD market, the high average power (315 W stabilized) of the LAMBDA SX 315C is suited for micromachining and packaging applications in microelectronics. Examples include laser direct patterning of flex circuits and laser lift-off.



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